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Piezo Stages With Aperture, stroke shorter than 1mm>
Carrier.OB100.C
Specifications
Active axes
Z
Mass
270 g
Travel range
100 μm
Pitch/Yaw
±10 µrad
Linearity
0.0003
Resolution(open loop)
0.2 nm
Resolution(closed-loop)
1 nm
Repeatability
10 nm
Sensor Type
Capacitive Sensor
Response Time
15 ms
Stiffness
0.5 N/um
Resonant Frequency(no load)
600 Hz
Resonant Frequency(150 g)
250 Hz
Controller
MC-Archimedes.N series
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